3 Sample positioning
Rz
Z
Y
X
2 & 3
Vertical MLL
(X, Y, Z, Φ, Χ)
2 Alignment and control of focusing optics
In X-ray imaging, the relative placement of focusing optic
elements, such as OSAs, zone plates and multilayer Laue
lenses, plays a crucial role in high spatial resolution setups
in order to go down in beam size. In addition, positioning
stages and scanners with closed loop interferometric
feedback can reduce thermal drift and instabilities down
to a few nm per hour.
Beam sizes are constantly shrinking
in a effort to resolve on even finer
structures in the user’s sample.
Triggering, detection, and feedback of
the sample position therefore needs
to be reliable, well documented, and
highly precise. Sample stages based on
piezo motors are usually the optimal
choice, as well as interferometers for
a contactless displacement sensing
with picometer resolution, to be
able to detect and correct any non-
orthogonality, parasitic movements,
or run-outs.
OSA
(X, Y, Z, Φ, Χ, Θ)
Sample
(X, Y, Z)
Y
Horizontal MLL
(X, Y, Z, Θ)
X
Θ
Φ
Χ
Z