Options
environment
|
/ RT, / HV, / UHV |
/ RT, / HV, / UHV |
/ RT, / HV, / UHV |
/ RT, / HV, / UHV |
encoder
high load
|
/ RES
/ HL(*)
|
/ RES
/ HL(*)
|
/ RES
/ HL(*)
|
/ RES
/ HL(*)
|
15 mm 3 mm / s 20 N 2 N |
6 mm 3 mm / s 20 N 2 N |
4.8 mm 3 mm / s 2 N 2 N |
Closed Loop Features
resolution / RES
repeatability / RES
|
200 nm
1-2 μm
|
200 nm
1-2 μm
|
200 nm
1-2 μm
|
200 nm
1-2 μm
|
Dimension | |
3x |
positioner series with smallest available footprint |
5x |
positioners designed for a 1” clear bore size |
10x |
positioners designed for a 2” clear bore size |
3xx |
linear positioners with integrated bearings |