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Linear Positioners

Linear Positioners ANPx341 ANPx321 ANPx311 ANPz102
Options
environment
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT, / HV, / UHV
encoder
high load
/ RES
/ HL(*)
/ RES
/ HL(*)
/ RES
/ HL(*)
/ RES
/ HL(*)
Dimensions footprint; height 40 x 45; 11.5 mm 40 x 41.6; 11.5 mm 30 x 30; 10 mm 24 x 24; 27 mm
Positioning Mode @ Ambient Conditions travel range drive velocity maximum load dynamic drive force
20 mm 3 mm / s 20 N 2 N(* 20N vertical mounting)
15 mm 3 mm / s 20 N 2 N
6 mm 3 mm / s 20 N 2 N
4.8 mm 3 mm / s 2 N 2 N
(* 20N vertical mounting)(* 3N load and force for / HL)
Closed Loop Features
resolution / RES
repeatability / RES
200 nm
1-2 μm
200 nm
1-2 μm
200 nm
1-2 μm
200 nm
1-2 μm
Naming Scheme
Type of Positioner ANP linear nanopositioner
Direction of Movement
x enabling movement in x or y direction z enabling movement in z direction
Dimension
3x
positioner series with smallest available footprint
5x
positioners designed for a 1” clear bore size
10x
positioners designed for a 2” clear bore size
3xx
linear positioners with integrated bearings
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