attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 11

Linear Positioners ECSx3080 ECSx3050 ECSx3030 ECSz3030
Options
environment
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT
encoder
/ NUM, / NUM +
/ NUM, / NUM +
/ NUM, / NUM +
/ NUM
high load
/ HL(*)
/ HL(*)
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Dimensions footprint; height 30 x 80; 9.5 mm 30 x 50; 9.5 mm 30 x 30; 9.5 mm 31 x 30; 31.5 mm
Positioning Mode @ Ambient Conditions
travel range
50 mm
30 mm
20 mm
5 mm
drive velocity
4.5 mm / s
4.5 mm / s
4.5 mm / s
2 mm / s
maximum load
20 N
20 N
10 N
8 N
dynamic drive force
1 N
1 N
1 N
8 N
( high load * 5 N)( high load * 5 N)
Closed Loop Features
presolution / NUM
1 nm
1 nm
1 nm
1 nm
repeatability / NUM
50 nm
50 nm
50 nm
50 nm
Options
Environment
Encoder
/ HL high load version
/ RT
room temperature
/ HV
high vacuum
/ UHV ultra-high vacuum
/ NUM(+) closed loop control based on an optoelectronic encoder