attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 10

Linear Positioners

Linear Positioners ECSx5050 ECSxy5050 ECSz5050
Options environment encoder high load
/ RT, / HV, / UHV
/ NUM, / NUM +
/ HL(*)
/ RT
/ NUM
---
/ RT
/ NUM
---
Dimensions footprint; height 50 x 50; 9.5 mm 50 x 50; 16.4 mm 50 x 50; 32 mm
Positioning Mode @ Ambient Conditions
travel range
drive velocity
maximum load
dynamic drive force
30 mm 4.5 mm / s 20 N 1 N
( high load * 5 N)
25 x 25 mm 2 4.5 mm / s 20 N 2 N
8 mm 2 mm / s 8 N 8 N
Closed Loop Features
resolution / NUM
repeatability / NUM
1 nm 50 nm
1 nm 50 nm
1 nm 100 nm
Naming Scheme
Type of Positioner ECS linear nanopositioner
Direction of Movement
x enabling movement in x or y direction xy enabling movement in x and y direction z enabling movement in z direction
Dimension
50xx
positioner width in mm
xx50
positioner length in mm
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