attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 13

Linear Positioners ANPz101 ANPx101 ANPz51 ANPx51 ANPz30
Options
environment
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT, / HV, / UHV
encoder
/ RES
/ RES
/ RES
/ RES
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high load
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Dimensions footprint; height 24 x 24; 20 mm 24 x 24; 11 mm 15 x 15; 13.5 mm 15 x 15; 9.2 mm ø 11; 12 mm
Positioning Mode @ Ambient Conditions
travel range
5 mm
5 mm
2.5 mm
3 mm
2.5 mm
drive velocity
3 mm / s
3 mm / s
1 mm / s
1 mm / s
1 mm / s
maximum load
2 N
1 N
0.5 N
0.25 N
0.1 N
dynamic drive force
2 N
2 N
1 N
1 N
0.2 N
Closed Loop Features
resolution / RES
200 nm
200 nm
200 nm
200 nm
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repeatability / RES
1-2 μm
1-2 μm
1-2 μm
1-2 μm
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Options
Environment
Encoder
/ HL high load version
/ RT
room temperature
/ HV
high vacuum
/ UHV ultra-high vacuum
/ RES closed loop control based on a resistive encoder