attoPUBLICATIONS brochure_nanopositioning-cyrogenic-instruments | Page 9

Linear Positioners ANPz101 ANPz102 ANPz101eXT12
Options environment
encoder high load
/ LT, / LT / HV, / LT / UHV, / RES / HL(*)
/ LT, / LT / HV, / LT / UHV, / ULT / RES, / RES +---
/ LT, / LT / HV, / LT / UHV / RES---
Dimensions footprint; height 24 x 24; 20 mm 24 x 24; 27 mm 24 x 24; 32 mm
Positioning Mode @ Ambient Conditions
travel range
drive velocity
maximum load
dynamic drive force
5 mm 3 mm / s 2 N 5 N
4.8 mm 3 mm / s 2 N 5 N
12 mm 3 mm / s 2 N 5 N
( high load * 3 N)
Closed Loop Features
resolution / RES
precision / RES
200 nm 1.. 2 µ m
200 nm 1.. 2 µ m
200 nm 1.. 2 µ m
Options
eXT
extended travel range
/ HL
high load version
Environment
/ LT low temperature / ULT ultra-low temperature / HV high vacuum / UHV ultra-high vacuum
Encoder
/ RES
closed loop control based on a resistive encoder
/ RES(+)
closed loop control based on a resistive encoder
for mK temperatures