Options environment
encoder high load
|
/ LT, / LT / HV, / LT / UHV, / RES / HL(*) |
/ LT, / LT / HV, / LT / UHV, / ULT / RES, / RES +--- |
/ LT, / LT / HV, / LT / UHV / RES--- |
Positioning Mode @ Ambient Conditions
travel range
drive velocity
maximum load
dynamic drive force
|
5 mm 3 mm / s 2 N 5 N |
4.8 mm 3 mm / s 2 N 5 N |
12 mm 3 mm / s 2 N 5 N |
( high load * 3 N) |
|||
Closed Loop Features
resolution / RES
precision / RES
|
200 nm 1.. 2 µ m |
200 nm 1.. 2 µ m |
200 nm 1.. 2 µ m |
Options | |
eXT |
extended travel range |
/ HL |
high load version |
/ RES |
closed loop control based on a resistive encoder |
/ RES(+) |
closed loop control based on a resistive encoder |
for mK temperatures |