Options |
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environment |
/ LT, / LT / HV, |
/ LT, / LT / HV, |
/ LT, / LT / HV, |
/ LT, / LT / HV, |
/ LT, / LT / HV, |
/ LT / UHV |
/ LT / UHV |
/ LT / UHV |
/ LT / UHV |
/ LT / UHV |
|
encoder |
/ RES |
/ RES |
/ RES |
/ RES |
/ RES |
high load |
/ HL(*) |
--- |
--- |
/ HL(*) |
/ HL(*) |
Closed Loop Features |
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resolution / RES |
200 nm |
200 nm |
200 nm |
200 nm |
200 nm |
precision / RES |
1.. 2 µ mz |
1.. 2 µ m |
1.. 2 µ m |
1.. 2 µ m |
1.. 2 µ m |
Naming Scheme |
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Type of Positioner |
Direction of Movement |
Dimension |
ANP |
linear nanopositioner |
x |
enabling movement in x or y direction |
3xx |
linear positioners with integrated bearings |
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