Options environment
encoder high load
|
/ LT, / LT / HV, / LT / UHV------ |
/ LT, / LT / HV, / LT / UHV / RES--- |
/ LT, / LT / HV,
/ LT / UHV
/ RES
|
/ LT, / LT / HV, / LT / UHV, / ULT / RES, / RES +--- |
Positioning Mode @ Ambient Conditions
travel range
drive velocity
maximum load
dynamic drive force
|
2.5 mm 1 mm / s 0.1 N 0.2 N |
3 mm 1 mm / s 0.25 N 1 N |
2.5 mm 1 mm / s 0.5 N 1 N |
5 mm 3 mm / s 1 N 2 N |
Closed Loop Features
resolution / RES
precision / RES
|
---
---
|
200 nm
1.. 2 µ m
|
200 nm
1.. 2 µ m
|
200 nm
1.. 2 µ m
|