attoPUBLICATIONS attoCATALOG-2015/16 | Page 317
Linear
Positioners
PAGE 315
Goniometers
ECS3080
ECS5050
ECGt5050
Rotators
ECGp5050
ECR3030
ECR4040
ECR5050
/RT, /HV, /UHV
optoelectronic (/NUM)
/HL
/HL
/HL
/HL
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30 x 80 x 9.5
50 x 50 x 9.5
50 x 50 x 17
50 x 50 x 17
30 x 30 x 13.5
40 x 40 x 14.5
50 mm
30 mm
10°
10°
360°
360°
4.5 mm/s
4.5 mm/s
approx. 3°/s
approx. 3°/s
approx. 10°/s
approx. 10°/s
240
150
10
10
20
20
1 (5 optionally)
1 (5 optionally)
8.7 Ncm (43.5 Ncm
optionally)
7 Ncm (35 Ncm
optionally)
2 Ncm
2 Ncm
1 nm
1 nm
1 µ°
1µ°
0.01 m°
0.04 m°
50 nm
50 nm
100 m°
100 m°
1 m°
4 m°
temperature
range
vacuum
range
magnetic
field range
travel
range
load
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50 x 50 x 13.5
360°
approx. 10°/s
20
4 Ncm
0.01 m°
1 m°
closed loop
resolution
attoMOTION
Piezo-based Nano Drives