attoPUBLICATIONS attoCATALOG-2015/16 | Page 317

Linear Positioners PAGE 315 Goniometers ECS3080 ECS5050 ECGt5050 Rotators ECGp5050 ECR3030 ECR4040 ECR5050 /RT, /HV, /UHV optoelectronic (/NUM) /HL  /HL /HL /HL --- --- 30 x 80 x 9.5 50 x 50 x 9.5 50 x 50 x 17 50 x 50 x 17 30 x 30 x 13.5 40 x 40 x 14.5 50 mm 30 mm 10° 10° 360° 360° 4.5 mm/s 4.5 mm/s approx. 3°/s approx. 3°/s approx. 10°/s approx. 10°/s 240 150 10 10 20 20 1 (5 optionally) 1 (5 optionally) 8.7 Ncm (43.5 Ncm optionally) 7 Ncm (35 Ncm optionally) 2 Ncm 2 Ncm 1 nm 1 nm 1 µ° 1µ° 0.01 m° 0.04 m° 50 nm 50 nm 100 m° 100 m° 1 m° 4 m° temperature range vacuum range magnetic field range travel range load --- 50 x 50 x 13.5 360° approx. 10°/s 20 4 Ncm 0.01 m° 1 m° closed loop resolution attoMOTION Piezo-based Nano Drives