PAGE 316
Industrial Line
ECS3030 - ECS3030/NUM | open loop & closed loop
nanoprecise stepper positioner for linear, horizontal motion
°C
5E-11 mbar
20 mm
9 kg
Size and Dimensions
5 days
delivery
0 .. 100 °C
Coarse Positioning Mode
footprint; height
30 x 30; 9.5 mm
travel range (step mode)
20 mm
maximum size
30 x 51.6; 9.5 mm
typical minimum step size
0.05 μm
weight (aluminum/stainless steel)
29/51 g
max. drive velocity (@ 300 K, no load)
4.5 mm/s
Materials
Fine Positioning Mode
positioner body
aluminum / stainless steel
fine positiong range
0 .. 1.6 μm
actuator
PZT ceramics
fine positioning resolution
sub-nm
bearings
stainless steel
Accuracy of Movement (open loop)
connecting wires
insulated twisted pair, copper
repeatability of step sizes
typically 5 % over full range
forward / backward step asymmetry
10%
Options
environmental options
/RT, /HV, /UHV
Accuracy of Positioning (closed loop)
material option
/Al, /StSt
position resolution
1 nm
encoder options
/NUM
repeatability
50 nm
Compatibility with Electronics
open / closed loop controller
Load @ Ambient Conditions (mounting orientation: axis horizontal)
ECC100
maximum vertical load
90 N (9 kg)
maximum dynamic force along the axis
1N
technical drawings can be found on page 328