PAGE 306
Scanners
ANSxyz100
open loop xyz-scanner, available with various scan ranges
14 days
delivery
14 days
delivery
10 mK .. 373 K
0 .. 31 T
5E-11 mbar
Size and Dimensions
100 g
up to 50 x 50 x
24 µm3
Fine Positioning Mode
footprint; height
24 x 24; 10 mm
weight
19 g
Materials (non-magnetic)
standard option
scan range (xyz)
50 x 50 x 24 µm3 @ 300 K
30 x 30 x 15 µm3 @ 4 K
high stability option 40 x 40 x 4.3 µm3 @ 300 K
9 x 9 x 2 µm3 @ 4 K
positioner body
titanium
actuator
PZT ceramics
scan resolution
driving shaft
ceramics
Accuracy of Movement
connecting wires
insulated twisted pair, copper
sub-nm resolution
repeatability
typically 0.1%
Options
creep
typically 0.5 .. 0.8% per decade of time
environmental options
/RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV
linearity
typically 5 .. 10% *
material option
/CuBe
Load @ Ambient Conditions (mounting orientation: axis horizontal)
encoder options
---
maximum vertical load
1 N (100 g)
maximum torque on the axis
20 Ncm
Compatibility with Electronics
open loop controller
ANC300: ANM200, ANM300
closed loop controller
ANC350/SCAN
* measured by maximum deviation from linear fit on full range
technical drawings can be found from page 308