attoPUBLICATIONS attoCATALOG-2015/16 | Page 309

ANSx150 large range open loop x-scanner 10 mK .. 373 K 0 .. 31 T Size and Dimensions 5E-11 mbar 125 µm 100 g Fine Positioning Mode footprint; height 24 x 24; 9 mm weight 18 g Materials (non-magnetic) fine positiong range 80 µm @ 300 K 125 µm @ 4 K fine positioning resolution sub-nm positioner body titanium Accuracy of Movement (open loop) actuator PZT ceramics scan repeatability typically 0.1 % connecting wires insulated twisted pair, copper creep typically 0.5 - 0.8 % per decade of time linearity typically 5 - 10 % Options environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV Load @ Ambient Conditions (mounting orientation: axis horizontal) material option /CuBe maximum vertical load 1 N (100g) encoder options --- maximum torque on the axis 10 Ncm Compatibility with Electronics Analog voltage amplifier ANC250 * measured by maximum deviation from linear fit on full range technical drawings can be found from page 308 attoMOTION Piezo-based Nano Drives Scanners PAGE 307