ANSz100
open loop z-scanner – three different scan ranges available
14 days
delivery
14 days
delivery
10 mK .. 373 K
0 .. 31 T
Size and Dimensions
5E-11 mbar
up to 50 µm2
100 g
Fine Positioning Mode
footprint; height
24 x 24; 10 mm
weight
19 g
Materials (non-magnetic)
scan range
positioner body
titanium
actuator
PZT ceramics
driving shaft
ceramics
connecting wires
insulated twisted pair, copper
Options
environmental options
/RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV
material option
/CuBe
encoder options
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Compatibility with Electronics
open loop controller
ANC300: ANM200, ANM300
closed loop controller
ANC350/SCAN
* measured by maximum deviation from linear fit on full range
standard range
24 µm @ 300 K
15 µm @ 4 K
large range
50 µm @ 300 K
30 µm @ 4 K
high stability
4.3 µm @ 300 K
2 µm @ 4 K
scan resolution
sub-nm resolution
Accuracy of Movement
repeatability
typically 0.1%
creep
typically 0.5 .. 0.8% per decade of time
linearity
typically 5 .. 10% *
Load @ Ambient Conditions (mounting orientation: axis horizontal)
maximum vertical load
1 N (100 g)
maximum torque on the axis
20 Ncm
technical drawings can be found from page 310
attoMOTION
Piezo-based Nano Drives
Scanners
PAGE 305