attoPUBLICATIONS attoCATALOG-2015/16 | Page 306

PAGE 304 Scanners ANSxy100 open loop xy-scanner – two different scan ranges available 14 days delivery 14 days delivery 10 mK .. 373 K 0 .. 31 T 5E-11 mbar Size and Dimensions up to 50 x 50 µm² 100 g Fine Positioning Mode footprint; height 24 x 24; 10 mm weight 18 g scan range Materials (non-magnetic) positioner body titanium actuator PZT ceramics drivin shaft ceramics connecting wires insulated twisted pair, copper Options environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV material option /CuBe encoder options --- Compatibility with Electronics open loop controller ANC300: ANM200, ANM300 closed loop controller ANC350/SCAN standard range 40 x 40 µm2 @ 300 K 9 x 9 µm2 @ 4 K large range 50 x 50 µm2 @ 300 K 30 x 30 µm2 @ 4 K scan resolution sub-nm Accuracy of Movement repeatability typically 0.1% creep typically 0.5 .. 0.8% per decade of time linearity typically 5 .. 10% * Load @ Ambient Conditions (mounting orientation: axis horizontal) maximum vertical load 1 N (100 g) maximum torque on the axis 20 Ncm * measured by maximum deviation from linear fit on full range technical drawings can be found from page 308