PAGE 248
Linear
Positioners
ANPz51eXT | open loop
linear, vertical, and compact stepper positioner with extended travel range
10 mK .. 373 K
0 .. 31 T
5E-11 mbar
Size and Dimensions
6 mm
50 g
Coarse Positioning Mode
footprint; height
15 x 15; 17 mm
travel range (step mode)
6 mm
maximum size
15 x 15; 23 mm
typical minimum step size
50 nm @ 300K, 10nm @ 4K
weight
13 g
max. drive velocity (@ 300 K, no load)
approx. 1 mm/s
Materials (non-magnetic)
Fine Positioning Mode
positioner body
titanium
fine positiong range
0 .. 5 μm @ 300K, 0 .. 0.8 μm @ 4K
actuator
PZT ceramics
fine positioning resolution
sub-nm
driving shaft
ceramics
Accuracy of Movement (open loop)
connecting wires
insulated twisted pair, copper
repeatability of step sizes
typically 5 % over full range
forward / backward step asymmetry
typically 5 %
Options
environmental options
/RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV
Load @ Ambient Conditions (mounting orientation: axis vertical)
material option
/CuBe
maximum vertical load
0.5 N (50 g)
encoder options
/RES
maximum dynamic force along the axis
1N
Compatibility with Electronics
open loop controller
ANC300: ANM150, ANM300
technical drawings can be found from page 264