Selected Measurements
superior position stability
10
5
Displacement (nm)
IDS Sensors
PAGE 214
Long-term IDS signal stability as demonstrated on a 77 mm
long cavity cooled to liquid helium temperature (-269°C) in
order to minimize thermal expansion/contraction.
0
−5
− 10
0
10
Time (h)
20 0
2
4
6
Counts (10 )
Proven sub-nanometer signal stability
The intrinsic signal stability of the IDS sensor – equivalent to its
positional repeatabilty - is unheard of in industrial position sensing.
While being specified to achieve a repeatability of 2 nm at 20 mm
working distance and 100Hz measurement bandwidth (in vacuum),
IDS sensors routinely achieve significantly better performance.
The actual measurement above shows positional stability as measured
with an IDS3010 on a titanium cavity cooled to liquid helium
temperature (-269 °C), temperature stabilized to few milli-degrees.
The plot shows position sensing data recorded on a 77 mm long cavity
during a 20 hour period of time, measured at 100 Hz bandwidth. The
standard deviation of the above shown measurement is 55 picometer!