IDS Sensors
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Real-time stage guiding accuracy analysis
4 Bearing errors detection with contact-less probe
Monitor your stage guiding accuracy in real time. With an angular tolerance exceeding several degrees, the IDS3010 can sense erratic pitch
and yaw motions. A simple closed loop regulation may then control
the carrier displacement within 6 degrees of freedom. The IDS3010
cost -effectiveness and compact design allow integration in industrial
systems as a set-and-forget sensor. Indeed, interferometry intrinsically
eliminates the need for time-consuming system recalibration.
2 In-situ live machine vibrometry
Diagnose your parts' vibrations instantaneously. The IDS3010
electronics performs a live Fast Fourier Transform (FFT) of the part
displacement. It enbales accurate, non-contact frequency analysis
with a bandwidth from DC to 10 MHz. Its modular and portable design
perfectly fits quality control applications and allow on-the-fly diagnosis
of a machine directly in the production line. Moreover, its interface
uses industry standards for easy integration.
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Characterize the error motions of your bearings. Depending on the
probe in use, the IDS3010 tolerates even curved and milled surfaces as
target. Therefore, users can monitor the motion at the exact location
of interest. For example, it can directly measure the actual runout
of a rotating shaft and avoids any in between errors sources such as
stage bearing imperfection (Abbe error) or slight angular encoder
misalignment.
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High velocity & ultra precision motion tracking
Track fast stage displacement with ultimate accuracy. In standard
operation, the IDS3010 detects a target's relative displacement over
range exceeding 5 m with sub-nanometer resolution. Its real-time
electronics outputs linear stage motion with velocities up to 2 m/s.
The sensor's compact and ergonomic design eases integration in
OEM setups and grants use of this state of the art device even to
non-specialists in interferometry.
In-situ live workpiece vibration analysis
Analyse directly your workpiece vibrations. The IDS3010 can recover
in-plane motion of a rotating milling machine workpiece. For example,
users can measure the difference in vibration spectra arising when the
milling process takes place as compared to the idle state. This crucial
information enables fine control of the machine tool in order to
eliminate contour errors or bad surface finish. This in turn improves
part quality and higher production throughput.
attoSENSORICS
Ultra Precision Sensors