attoPUBLICATIONS attoCATALOG-2015/16 | Page 217

Selected Measurements high speed position sensing 1 Displacement (m) 0.5 High bandwidth displacement detection of a target mounted onto a linear drive stage. The drive operates at a maximum velocity of 2 m/s, over a travel range of 1m. 0 −0.5 −1 0 5 10 15 20 Time (s) Compliant with high-bandwidth & high-velocity applications Along with exceptional signal stability and picometer resolution, the IDS sensor family is designed to measure target position variations at very high pace. With a measurement bandwidth of 10 MHz, IDS sensors are able to master target displacement velocities of up to 2 m/s. This capability enables applications where objects are moved over macroscopic ranges at high speed while the target’s final location needs to be recorded with nanometer resolution. A typical application is shown in the graph above where the target has been mounted onto a linear drive, providing travel velocities of up to 2 m/s over 1 m range. attoSENSORICS Ultra Precision Sensors IDS Sensors PAGE 215