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CUSTOMER FEEDBACK
CUSTOMER FEEDBACK
Dr. Stefan Kubsky
Nicolas Stübe, Dr. Alke Meents
An intense and ongoing scientific exchange with the attocube-development
team permitted us to obtain new functionalities and highest precision. Our
system, being inherently non-standard, profits greatly from the compactness
and modularity of the sensor heads. We rapidly managed to file a patent
application implying interferometric metrology.
Due to the fast adjustment and precise sub-nanometer resolution of the sensor, we are able to easily identify
trajectories and eigen frequencies for the optimization of flexure based components. The combination of
the digital interfaces with our motion control system allows most accurate closed-loop control for scanning
applications. With the closed-loop integration of the IDS3010 in our X-ray microscope by the end of this year,
we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm
within the beginning of 2016.
(Synchrotron Soleil St. Aubin, France)
(DESY/suna-precision GmbH, Hamburg, Germany)
Fields of Applications - Examples
Sensor
number of sensor axes
3
working distance
0…5000 mm (depending on sensor head)
sensor resolution
1 pm
sensor repeatability
2 nm1)
max. target velocity
2 m/s
measurement bandwidth
10 MHz
signal stability (WD: 77 mm)
0.110 nm (2σ)
Modes of Operation
Coordinate
Measurement
Real-Time
Vibration Detection
measurement modes
displacement
remote operation
integrated webserver
output signal: electronics
sin/cos, AquadB, HSSL, field bus systems (opt.)
output signal: displacement measurement
laser light (IR)
output signal: alignment laser
laser light (VIS)
sensor alignment
via integrated webserver o "D