FPS Sensor
Systems
PAGE 200
Selected Measurements
unsurpassed signal stability
Measured Long-Term Signal Stability
working distance [mm]
2σ [nm]
20
0.286
50
0.530
100
1.035
Measured Short-Term Signal Stability
working distance [mm]
2σ [nm]
30
0.039
Long-term FPS signal stability as demonstrated on a
20 mm long Titanium vacuum reference cavity. The cavity
is cooled to liquid helium temperature (-269 °C) in order
to minimize thermal expansion/contraction. 68% of all
position measurement data points lie within 286 pm, as
measured at a 100 Hz bandwidth