attoPUBLICATIONS attoCATALOG-2015/16 | Page 203

Selected Measurements high speed position detection High-bandwidth displacement detection of a target mounted onto a linear drive stage. The drive operates at a maximum velocity of 2 m/s. The velocity is numerically derived from the time-dependent position data. High-bandwidth application mastered with ease Along with exceptional signal stability and picometer resolution, the FPS sensor family is designed to measure target position variations at very high pace. With a measurement bandwidth of 10 MHz, FPS sensors are able to master target displacement velocities of up to 2 m/s. This capability enables applications where objects are coarse-positioned at high speed while the target’s final location needs to be recorded with nanometer resolution. A typical application is shown in the graph above where the target has been mounted onto a linear drive, providing travel velocities of up to 2 m/s over 0.5 m range. While the FPS sensor is capable to keep track with the position of the target even at the maximum travel velocity, it also shows the positional inaccuracy of the linear drive when approaching position B, indicated by a position overshoot by more than 5 microns (inlay). While only used for position measurement in this application, the FPS sensor is widely used for closed-loop control of drive units once connected to the drive controller by one of its real-time interfaces. (attocube applications labs, 2014) attoSENSORICS Ultra Precision Sensors FPS Sensor Systems PAGE 201