attoPUBLICATIONS attoCATALOG-2015/16 | Page 201

FPS Sensor Systems PAGE 199 Highly precise micro manufacturing Ever increasing requirements for precision and size of machined parts have driven the development of highest-precision machining tools. The Square Foot Manufacturing concept separates well-known machining centers into small-sized sub-groups having standardized interfaces not only for power and data transmission but also for the transmission of processing forces and moments. Laser interferometry plays a key role in the piezo-based feed units of this concept as well as in the measurement of the reproducibility of these interfaces. (attocube application note SEN07, 2013) Ultra precise contactless detection of bearing errors Error motions of rotating objects are of major interest in high precision mechanical engineering. In case of a high speed spindle, even sub-nm deviations from a perfect rotation can create undesired vibrations or error movements. Monitoring error motion with sub-nm resolution is therefore of prime necessity from state of the art mechanical engineering to nanotomography research. (attocube application note SEN08, 2013) High resolution X-ray microscopy When developing an X-ray microscope capable of nm resolution, careful design is a must. Thermal and mechanical stability of the components and assemblies has to be followed throughout the process. The attoFPSensor shows superior performance regarding its outstanding stability and its capability of measuring sub-nm displacements and is therefore the ideal supplement for the mechanical control of all components used in the described X-ray microscope setup achieving a resolution in the order of 40 nm. (attocube application note SEN09, 2013) attoSENSORICS Ultra Precision Sensors