Lithography Process
Axis 1
• Ultraprecise Position Tracking
s 1
Axis 2
Axis 2
Axis 3
X
Axis 1 Axis 2
Axis 3
Linear Positioner X
10°
Axis 1
Axis 2
X
Linear Positioner X
Goniometer
Goniometer
Axis 3
10°
Y
Goniometer
Goniometer
Linear Positioner Y
Linear Positioner Y
Y
360°
Rotator
Control Unit IDS3010
Linear Positioner Y
Z
360°
Horizontal Z
Connecting Fiber
Axis 1
Rotator
Axis 2
Axis 3
1 Axis 2
Sensor Heads
Axis 3
X
Linear Positioner X
10°
Control Unit IDS3010
Linear Positioner Y
Z
Horizontal Z
Connecting Fiber
Axis 1
Axis 2
Axis 3
Sensor Heads
Goniometer
Goniometer
Y
Linear Positioner Y
Linear Positioner Y
360°
Z
Rotator
Horizontal Z
Connecting Fiber
Axis 1
Axis 2
Axis 3
Control Unit IDS3010
Sensor Heads
Connecting Fiber
Axis 1
Axis 2
Axis 3
Control Unit IDS3010
Sensor Heads