attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 32

Scientific Instruments
Challenge:
Benefits:
• UHV compatibility up to 5 x 10-11 mbar attocube ´ s solution:

Scientific Instruments

NanoNeRF under a Scanning Electron Microscope( SEM)

Nanorobotic System Multi-View SEM Images 3D Reconstruction

Challenge:

Nanoscale 3D reconstruction under a scanning electron microscope( SEM) requires extreme precision in positioning and stability. Multi-view SEM imaging for neural radiance field( NeRF) reconstruction demands accurate translational and rotational alignment at the subnanometer scale. Any drift or misalignment can introduce errors, degrading the quality of the reconstructed model. Additionally, maintaining in-situ stability while capturing highresolution images presents a major challenge. A reliable nanopositioning system is crucial to ensuring seamless integration of NeRF, enabling high-fidelity nanoscale imaging and overcoming the limitations of traditional SEM-based reconstruction methods.

Benefits:

• nanometer precision
• stackable positioners

• UHV compatibility up to 5 x 10-11 mbar attocube ´ s solution:

attocube’ s ECSx3030 and ECR3030 nanopositioners provide sub-nanometer precision and long-term stability for accurate sample alignment under SEM. Their piezo-driven technology ensures smooth, multi-axis motion, enabling precise positioning and rotation essential for high-quality 3D reconstruction with NeRF.
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