attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 31

Scientific Instruments
Challenge:
attocube ´ s solution:
Benefits:

Scientific Instruments

Atom Probe Tomography

Challenge:

Achieving simultanious atomic-scale 3D imaging and chemical analysis is extremely challenging. With the unique APT method CAMECA offers this possibility. A frozen specimen tip, just 50 – 100 nm in radius, must be precisely positioned along three axes in UHV. Laser or voltage pulses evaporate single atoms, requiring nanometer accuracy to ensure 0.1 nm resolution for reliable material analysis.

attocube ´ s solution:

attocube’ s compact and modular nanopositioners can be combined into multi-axis motion systems, offering the highest precision and stability even under challenging environmental conditions. This allows reliable sample or probe positioning in advanced material analysis systems.

Benefits:

• nanometer precision
• stackable positioners
• UHV compatibility up to 5 x 10-11 mbar
• bake out up to 150 ° C