attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 19

Rotators ANR101 ANRv51 ANR51 ANR31
Options
environment
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT, / HV, / UHV
/ RT, / HV, / UHV
encoder
/ RES
/ RES
/ RES
---
high load
---
---
Dimensions footprint; height 24 x 24; 15.2 mm 10 x 20; 21 mm 15 x 15; 9.5 mm ø 10; 7.5 mm
Positioning Mode @ Ambient Conditions
travel range
360 °
360 °
360 °
360 °
drive velocity
30 °/ s
10 °/ s
10 °/ s
3 °/ s
maximum load
1 N
0.2 N
0.3 N
0.05 N
dynamic drive torque
0.8 Ncm
0.2 Ncm
0.2 Ncm
0.03 Ncm
Closed Loop Features
resolution
6 m °( RES)
6 m °( RES)
6 m °( RES)
---
repeatability
50 m °( RES)
50 m °( RES)
50 m °( RES)
---
Environment
Encoder
/ RT
room temperature
/ HV
high vacuum
/ UHV ultra-high vacuum
/ NUM closed loop control based on an optoelectronic encoder / RES closed loop control based on a resistive encoder