ECGt5050 - ECGt5050/NUM | open loop & closed loop
nanoprecise stepper goniometer
°C
5E-11 mbar
10°
1 kg
Size and Dimensions
0 .. 100 °C
Coarse Positioning Mode
footprint; height
50 x 50; 17 mm
travel range (step mode)
10°
maximum size
50 x 67.6; 19.4 mm
typical minimum step size
0.1 m°
distance center of rotation to bottom
77 mm
max. drive velocity (@ 300 K, no load)
3 °/s
weight (aluminum/stainless steel)
137 / 247 g
Fine Positioning Mode
Materials
fine positiong range
0 .. 1.4 m°
positioner body
aluminum / stainless steel
fine positioning resolution
μ°
actuator
PZT ceramics
Accuracy of Movement (open loop)
bearings
stainless steel
repeatability of step sizes
typically 5 % over full range
connecting wires
insulated twisted pair, copper
forward / backward step asymmetry
10%
Options
Accuracy of Positioning (closed loop)
environmental options
/RT, /HV, /UHV
position resolution
1 μ°
material option
/Al, /StSt
repeatability
50 μ°
encoder options
/NUM
Load @ Ambient Conditions (mounting orientation: axis horizontal)
high load option
/HL/RT
maximum vertical load
Compatibility with Electronics
open / closed loop controller
10 N (1 kg)
maximum dynamic torque along the axis 8.7 Ncm (/HL: 43.5 Ncm)
ECC100
technical drawings can be found on page 329
attoMOTION
Piezo-based Nano Drives
Industrial Line
PAGE 323