PAGE 322
Industrial Line
ECS5050 - ECS5050/NUM | open loop & closed loop
nanoprecise stepper positioner for linear, horizontal motion
°C
5E-11 mbar
30 mm
Size and Dimensions
15 kg
0 .. 100 °C
Coarse Positioning Mode
footprint; height
50 x 50; 9.5 mm
travel range (step mode)
30 mm
maximum size
50 x 81.6; 9.5 mm
typical minimum step size
0.05 μm
weight (aluminum/stainless steel)
70/149 g
max. drive velocity (@ 300 K, no load)
4.5 mm/s
Materials
Fine Positioning Mode
positioner body
aluminum / stainless steel
fine positiong range
0 .. 1.6 μm
actuator
PZT ceramics
fine positioning resolution
sub-nm
bearings
stainless steel
Accuracy of Movement (open loop)
connecting wires
insulated twisted pair, copper
repeatability of step sizes
typically 5 % over full range
forward / backward step asymmetry
10%
Options
environmental options
/RT, /HV, /UHV
Accuracy of Positioning (closed loop)
material option
/Al, /StSt
position resolution
1 nm
encoder options
/NUM
repeatability
50 nm
high load option
/HL/RT
Load @ Ambient Conditions (mounting orientation: axis horizontal)
Compatibility with Electronics
open / closed loop controller
ECC100
maximum vertical load
150 N (15 kg)
maximum dynamic force along the axis
1 N (/HL: 5N)
technical drawings can be found on page 329