Closed Loop Scanning & Ultra-Large Scan Range
...included with any attoSPM+
Using piezo-based scanners usually relies on the assumption that
the relation between applied voltage and displacement is linear.
In reality, most scanners show large non-linear behaviour and
hysteresis, especially for large scan ranges. Creep, i.e. drift in
position after approaching a certain location, is a further phenomenon which is common to all piezo scanners. In some experiments,
reproducibly locating a small feature on a surface is crucial, and
sometimes hysteresis and non-linearity in the acquired image are
not acceptable.
This is why the new attoDRY LAB microscopes attoSPM+ are now all
equipped with attocube’s unique fiber-based attoFPS interferometer for closed loop functionality with a resolution of 1 nm.
12
5 µ
m
125 µm
Besides, we managed to further increase the available scan ranges
from 50 µm x 50 µm at 300 K and 30 µm x 30 µm at 4 K to a stunning
80 µm x 80 µm at 300 K, and an even larger 125 µm x 125 µm at 4 K.
Since this covers an area larger by more than a factor of 16, locating and recovering your region of interest has never been that
easy. Naturally, this large range is also covered by our closed loop
encoder.
1
Closed Loop1
Interferometric Encoder
steady-state resolution (100 ms sample time)
1 nm rms typ.
contouring error (10 μm lines)
12 nm @ 1 μm/s scan speed
80 nm @ 10 μm/s scan speed
time constant (1 μm step response)
11.7 ms
closed loop functionality currently available in combination with a microscope housing and an ASC500 SPM controller
attoDRY LAB
Dry Measurement Systems
attoDRY LAB
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