attoPUBLICATIONS attoCATALOG-2015/16 | Page 281

Goniometers PAGE 279 Product Name top view bottom view 15 10 ANGp50 inner position 3 2 x M2 3 x M1.6 1.5 10 15 10.4 10.4 10 3 X 45° 17.1 2.5 24 2x M2.5 2.9° 6x M2 3 20 26.4 11 11.8 11.8 11 5 X 45° 11 15 6 24 3.3° 3.3° ANGp101 10 2.9° 17.5 26.3 24 side view outer position 2 24 2x M2.5 6 26.4 26.4 24 6x M2 3 20 11 11.6 11.6 11 24 2.7° ANGp101/ RES 2.7° 11 2 2x M2.5 24 6 26.4 28 20 6 x M2 ANGp101/NUM 2.5 11 11 11.6 11.6 6.5 11 26.5 2.7° 2 24 2.7° attoMOTION Piezo-based Nano Drives