PAGE 262
Linear
Positioners
ANPx341 | open loop
bearing-based, linear, horizontal stepper positioner
10 mK .. 373 K
0 .. 31 T
5E-11 mbar
2 kg
20 mm
Optimized for ultra-high stability applications
(such as STM or optical cavity experiments) due to
enhanced stiffness and high resonance frequencies.
Size and Dimensions
Coarse Positioning Mode
footprint; height
40 x 45; 11.5 mm
travel range (step mode)
20 mm
maximum size
40 x 53.3; 11.5 mm
typical minimum step size
100 nm @ 300 K, 20nm @ 4 K
weight
76 g
max. drive velocity (@ 300 K, no load)
approx. 3 mm/s
Materials (non-magnetic)
Fine Positioning Mode
positioner body
titanium
fine positiong range
0 .. 7.5 μm @ 300 K, 0 .. 1.2 μm @ 4 K
actuator
PZT ceramics
fine positioning resolution
sub-nm
bearings
ceramics
Accuracy of Movement (open loop)
driving shaft
ceramics
repeatability of step sizes
typically 5 % over full range
connecting wires
insulated twisted pair, copper
forward / backward step asymmetry
typically 5 %
Options
Load @ Ambient Conditions (mounting orientation: axis horizontal)
environmental options
/RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV
maximum vertical load
20 N (2 kg)
material option
---
maximum dynamic force along the axis
2N
encoder options
/RES, /NUM
high load option
/HL/RT, /HL/UHV, HL/LT
Compatibility with Electronics
open loop controller
ANC300: ANM150, ANM300
technical drawings can be found from page 268