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Linear
Positioners
ANPx321 | closed loop
bearing-based, linear, horizontal stepper positioner with position encoders
ANPx321 | RES - positioner with resistive encoder
200 nm
10 mK .. 373 K
0 .. 31 T
Size and Dimensions
footprint; height
44 x 41.6; 11.5 mm
maximum size
44 x 49.1; 11.5 mm
weight
80 g
Accuracy of Positioning
encoder type
resistive sensor
sensor resolution
approx. 200 nm
repeatability
approx. 1 .. 2 µm
Compatibility with Electronics
closed loop controller
ANC350/RES
for all other specifications see open loop model ANPx321
ANPx321 | NUM - positioner with optoelectronic encoder
°C
1 nm
0 .. 100 °C
0 .. 7 T
Size and Dimensions
footprint; height
44 x 41.6; 11.5 mm
maximum size
44 x 49.1; 11.5 mm
weight
81 g
Accuracy of Positioning
encoder type
optoelectronic sensor
sensor resolution
1 nm
repeatability
50 nm
Compatibility with Electronics
closed loop controller
/NUM encoders are only compatible with /RT, /HV, and /UHV conditions
ANC350/NUM
for all other specifications see open loop model ANPx321
attoMOTION
Piezo-based Nano Drives