PAGE 250
Linear
Positioners
ANPx101 | open loop
linear, horizontal stepper positioner
14 days
delivery
14 days
delivery
10 mK .. 373 K
0 .. 31 T
5E-11 mbar
Size and Dimensions
5 nm
100 g
Coarse Positioning Mode
footprint; height
24 x 24; 11 mm
travel range (step mode)
5 mm
maximum size
24 x 29; 11 mm
typical minimum step size
50 nm @ 300 K, 10nm @ 4 K
weight
20 g
max. drive velocity (@ 300 K, no load)
approx. 3 mm/s
Materials (non-magnetic)
Fine Positioning Mode
positioner body
titanium
fine positiong range
0 .. 5 μm @ 300 K, 0 .. 0.8 μm @ 4 K
actuator
PZT ceramics
fine positioning resolution
sub-nm
driving shaft
ceramics
Accuracy of Movement (open loop)
connecting wires
insulated twisted pair, copper
repeatability of step sizes
typically 5 % over full range
forw ard / backward step asymmetry
typically 5 %
Options
environmental options
/RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV
Load @ Ambient Conditions (mounting orientation: axis horizontal)
material option
/CuBe
maximum vertical load
1 N (100 g)
encoder options
/RES, /NUM
maximum dynamic force along the axis
2N
Compatibility with Electronics
open loop controller
ANC300: ANM150, ANM300
technical drawings can be found from page 266