attoPUBLICATIONS attoCATALOG-2015/16 | Page 243
Linear
Positioners
PAGE 241
ANPz101
ANPz102
ANPz101eXT12
/RES, /NUM
/RES
ANPx321
ANPx341
/RES, /NUM
/RES
/HL
---
/RES, /NUM
/RES, /NUM
---
/HL
/HL
/HL
24 x 24 x 20
24 x 24 x 27
24 x 28 x 32
30 x 34 x 10
40 x 44 x 11.5
45 x 44 x 11.5
5
5
12
6
15
20
3
3
3
3
3
3
2
2
2
20
20
20
5
5
5
2
2
2
/RT,
/HV,
/UHV,
ANPx311
/LT,
/LT/HV,
/LT/UHV
200
200
200
200
200
200
1..2
1..2
1..2
1..2
1..2
1..2
1
---
1
---
1
1
150
---
150
---
50
50
temperature
range
vacuum
range
magnetic
field range
travel
range
load
closed loop
resolution
attoMOTION
Piezo-based Nano Drives