attoPUBLICATIONS attoCATALOG-2015/16 | Page 242
Premium Line Linear Positioners – Product Finder
PAGE 240
Product Finder
choose your type of attocube’s ANP linear nanopositioners
Linear Positioners
product name
ANPz30
ANPx51
ANPz51
ANPz51eXT
ANPx101
encoder
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/RES, /NUM
/RES, /NUM
/RES
/RES, /NUM
high load
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ø 11 x 12
15 x 15 x 9.2
15 x 15 x 13.5
15 x 18 x 17
24 x 28 x 11
5
Options
environmental
/RT,
/HV,
/UHV,
/LT,
/LT/HV,
/LT/UHV
Dimensions
max. footprint x height [mm³]
Positioning Mode @ Ambient Conditions
travel range [mm]
2.5
3
2.5
6
drive velocity [mm/s]
1
1
1
1
3
maximum load [N]
0.1
0.25
0.5
0.5
1
dynamic drive force [N]
0.2
1.5
1
1.5
2
Closed Loop Features
resolution /RES [nm]
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200
200
200
200
repeatability /RES [µm]
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1..2
1..2
1..2
1..2
resolution /NUM [nm]
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1
1
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1
repeatability /NUM [nm]
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50
50
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