Adaptable modules and components
2 Vacuum Feedthroughs
1 Options for accessing
the IDS via Computer (optional)
• Measurement Software WAVE
• Webserver
• DLLs (C, C#, Labview, Matlab) • KF or CF flanges
• One or three fibers
• Customized options available
2
3 Realtime Output-Signals:
1
• Sin/cos
• HSSL
• Linear analog
• AquadB
• BiSS-C
4 Environmental
Compensation Unit (ECU)
• Sensor heads compatible to
extreme environments (HV, UHV, LT, RAD)
• Only for ambient conditions: ECU to
compensate environmental influences
3
4
Working distance up to 5 m 1 pm-resolution & certified accuracy
The three axes of the IDS3010 allow displacement
measurements at long distances until 5 m. The digital resolution of the IDS3010 is 1pm, while the PTB has quantified the
systematic error of measurement to 0.0ppm between 0 and 3m*
* total expanded measurement uncertainty: