attoPUBLICATIONS brochure_semicon-joomag | Page 19

Extreme Environments attocube‘s nano drives meet the challenge of precise positioning systems, reliably working under extreme environmental conditions. Suitable models are available for high temperature, high and ultra high vacuum. Every positioner is tested in it’s mentioned environment to ensure reliable functionality in any critical situation. UHV Pressure • down to 5 x 10 -11 mbar Clean Room • low particle generation High Temperature • up to 100°C Compact, precise, & powerful attocube‘s positioners employ a powerful and precise nano drive in a compact frame for easy integration into customer setups. Footprint • from 15 x 15 mm 2 Dynamic Force • up to 8 N Resolution • down to 1 nm Flexible positioning attocube‘s positioners can be stacked to multiaxis devices with up to 6 degrees of freedom. X Rotation Goniometer Z Y X Linear Positioner