Displacement Measuring Interferometer
ultra-precise sensor for semiconductor applications
The continuous increase of ultra precise motion control
in the semiconductor equipment makes the IDS3010
(Interferometric Displacement Sensor) the perfect choice
for industrial manufacturers in the industry. attocube’s laser
interferometer provides miniaturized sensor heads, suitable
for harsh environment with extreme accuracy and resolution
down to pico-meter level. This is the outstanding combination
for easy integration within semiconductor machines thanks to
a broad spectrum of digital and analog real-time interfaces
and protocols to deliver simple transmission of position data.
Control Unit IDS3010
Fast, precise
& powerful
• data capturing rate of 10 MHz
• measurements with target velocities of up to 2 m/s
• working distances up to 5 m
• 1 pm resolution