attoPUBLICATIONS brochure_semicon-joomag | Page 14

10° Axis 1 Goniometer Axis 2 X Linear Positioner X Linear Positioner X 10° Axis 1 Axis 2 X Linear Positioner X Axis 3 Goniometer 10° Goniometer 10° Goniometer Goniometer Axis 3 Linear Positioner X 10° 10° Y 360° Rotator Goniometer Linear Positioner Y Rotator Goniometer Goniometer Goniometer Y Linear Positioner Y Linear Positioner Y Rotator Rotator Goniometer Axis 3 Linear Positioner Y 360° Axis 1 Axis Axis 1 2 Axis 2 Axis 3 Horizontal Z XAxis 1 Linear Positioner X Linear Positioner X Z 10° Goniometer X Axis 3 10° Goniometer Axis 360° Rotator Rotator Horizontal Z Z Goniometer Control Unit IDS3010 Goniometer Connecting Fiber Goniometer Axis 1 Goniometer Axis 2 Axis 3 Rotator Sensor Heads Y Y Linear Positioner Y Gon Control Unit IDS3010 Control Unit IDS3010 Connecting Fiber Axis 1 Axis 2 Axis 3 Sensor Heads Sensor Heads Linear Positioner Y 360° Linear Positioner Y 360° Rotator Goniometer Linear Positioner Y Linear Positioner Y 360° Z Rotator Rotator Z Rotator Rotator Horizontal Z Horizontal Z Connecting Fiber Connecting Fiber Axis 1 Axis 1 Axis 2 Axis 2 Control Unit IDS Axis 3 Axis 3 Control Unit IDS3010 Sensor Heads