attoPUBLICATIONS brochure_semicon-joomag | Page 12

Axis 1 Axis 2 Linear Positioner X Metrology & Inspection Lithography Process • Accurate Beam Aperture & Filter Positioning Axis 3 Goniometer Axis 1 Axis 3 Goniometer Axis 2 Y 10° Linear Positioner X X Linear Positioner X 10° Linear Positioner Y Linear Positioner Y 360° Goniometer Goniometer Rotator Horizontal Z Connecting Fiber Axis 1 2 3 Axis 1 Control Unit IDS3010 Sensor Heads Linear Positioner Y 360° Connecting Fiber Axis 1 Axis 2 Axis 3 Control Unit IDS3010 Axis 3 Sensor Heads Z Y Linear Positioner Y Linear 1 Positioner Axis 2Y Axis 2 Axis 3 Goniometer X X Linear Positioner X Linear Positioner X 10° Z 10° Goniometer Rotator Goniometer Horizontal Z Linear Positioner Y Y Goniometer Linear Positioner Y Control Unit IDS3010 Linear Positioner Y 360° Connecting Fiber Axis 1 Axis 2 Axis 3 Rotator Sensor Heads Horizontal Z Connecting Fiber Axis 1 Axis 2 Axis 3 Y Z Linear Positioner Y 360° Control Unit IDS3010 Sensor Heads Z Rotator Horizontal Z Connecting Fiber Axis 1 Axis 2 Axis 3 Z Y X Control Unit IDS3010 Sensor Heads Horizontal Z Linear Positioner Y Linear Positioner X