attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 36

General Information glossary

Scanners and Stepping Positioners
All attocube scanners and stepping positioners are driven via piezoceramics made from lead zirconite titanate( PZT) for voltages < 150 V. The PZT for cryogenic scanners and steppers is optimized for maximal performance under these conditions.
• Scanners
Scanners are suitable for travel ranges in µ m range and their motion is continuous. Our scanners are recognizable by the name „ ANS“.
Working Principle of Stepping Positioners
• Stepping Positioners
Stepping positioners are suitable for travel ranges in mm range. They are driven via slip-stick principle( sawtooth voltage). There are two different positioner series –“ ANP” and“ ECS”.
1 2 3
At Rest Sticking Phase Slipping Phase
Applied voltage
Piezo Voltage
1
AT REST
Time
Piezo Voltage
STICK
2
Time
Piezo Voltage
SLIP
3 Time
ECS Series ANP Series
Piezoelectric actuator
Clamped table Guiding rod
Flexible membrane Fixed frame
Flexible membrane supports the piezo and the axis
∆x net step is completed
• moving table clamped to guiding rod
• guiding rod is connected to piezo element
• no voltage is applied → table at rest
• sawtooth shaped voltage is applied to piezo
• with the slow flank, table sticks to guiding rod and is moved about distance delta x)
• delta x down to 50 nm
• steep flank of voltage, the rod is accelerated fast
• table overcomes friction and disengages from drive element
• step is completed www. attocube. com