attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 27

Optics and Photonics
Challenge:
Benefits:
• 360 ° endless travel attocube ´ s solution:

Optics and Photonics

Filter & Aperture Wheel Rotation

Challenge:

Filter and aperture wheels are essential for compact and automated beam manipulation in optical systems, particularly in microscopy and semiconductor metrology. To resolve nanometer structures, beam properties must not be impacted, requiring precise positioning of filters and apertures over angular ranges exceeding 180 °. Advanced systems may also demand multiple in-line filter wheels in vacuum and cleanroom conditions.

Benefits:

• 1 m ° precision
• UHV compatible up 1 x 10-9 mbar

• 360 ° endless travel attocube ´ s solution:

In addition to cleanroom and vacuum compatibility down to 1 x 10-9 mbar, attocube ´ s rotation stages offer µ° angular resolution and a 360 ° endless travel range. Despite the compact size loads of more than 1 kg are possible and the rotation stage can be easily combined with other piezo positioners for multi-axis movements.