attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 15

Scanners ANSz100 / std ANSz100 / lr ANSxyz50 ANSxy50 ANSz50
Options environment / RT, / HV, / UHV / RT, / HV, / UHV / RT, / HV, / UHV / RT, / HV, / UHV / RT, / HV, / UHV
Dimensions footprint; height 24 x 24; 10 mm 24 x 24; 12 mm 15 x 15; 13 mm 15 x 15; 7 mm 15 x 15; 6 mm
Scan Mode
fine positioning range @ 300 K
24 μm
50 μm
30 x 30 x 4.3 μm 3
30 x 30 μm 2
4.3 μm
fine positioning range @ 4 K
15 μm
30 μm
15 x 15 x 2 μm 3
15 x 15 μm 2
2 μm
maximum load
1 N
1 N
0.5 N
0.5 N
0.5 N
Options
Environment
/ std standard range option / lr large range option
/ RT
room temperature
/ HV
high vacuum
/ UHV ultra-high vacuum