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ECSz5050 - ECSz5050/NUM | open loop & closed loop
nanoprecise stepper positioner for linear, vertical motion
DEVELOPMENT
PRODUCTS
€
°C
MIO. €
SOFT/HARDWARE
€
R&D ENGINEER
REVENUE
MIC
8 mm
800 g
available in our webshop
0 .. 100 °C
shop.attocube.com
attoshop
DEVELOPMENT
€
€
MIO. €
Size and Dimensions
SOFT/HARDWARE
REVENUE
R&D ENGINEER
Coarse Positioning Mode
footprint; height 50 x 50; 32mm travel range (step mode) 8 mm
max installation space 50 x 50; 40.5 mm typical minimum step size 30 nm
weight (aluminum) 161 g max. drive velocity (@ 300 K, no load) 2 mm/s
Materials
Fine Positioning Mode
positioner body aluminum fine positioning range 0 .. 0.8 µm
actuator PZT ceramics fine positioning resolution sub-nm
bearings stainless steel Accuracy of Movement (open loop) connecting wires insulated twisted pair, copper repeatability of step sizes typically 5 % over full range
forward / backward step asymmetry typically 5-10 %
Options
environmental options /RT Accuracy of Positioning (closed loop) material option /Al position resolution 1 nm
encoder options /NUM repeatability 50 nm
Compatibility with Electronics
open / closed loop controller
Load @ Ambient Conditions (mounting orientation: vertical)
ECC100
maximum vertical load 8 N (800 g)
maximum dynamic force along the axis 8 N