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Linear Positioners
PAGE 348

ECSx5050- ECSx5050 / NUM | open loop & closed loop nanoprecise stepper positioner for linear, horizontal motion

Linear Positioners
° C
5E-11 mbar 30 mm 15 kg
0.. 100 ° C
€
€
MIC attoshop available in our webshop shop. attocube. com
Size and Dimensions footprint; height max installation space weight( aluminum / stainless steel) Materials positioner body actuator bearings connecting wires Options environmental options material option encoder options high load option Compatibility with Electronics open / closed loop controller
50 x 50; 9.5 mm 50 x 81.6; 9.5 mm 70 / 149 g
aluminum / stainless steel PZT ceramics stainless steel insulated twisted pair, copper
/ RT, / HV, / UHV / Al, / StSt / NUM / HL / RT
ECC100
Coarse Positioning Mode
travel range( step mode)
30 mm
typical minimum step size
50 nm
max. drive velocity(@ 300 K, no load)
4.5 mm / s
Fine Positioning Mode
fine positioning range
0.. 1.6 μm
fine positioning resolution
sub-nm
Accuracy of Movement( open loop)
repeatability of step sizes
typically 5 % over full range
forward / backward step asymmetry
typically 5-10 %
Accuracy of Positioning( closed loop)
position resolution
1 nm
repeatability
50 nm
Load @ Ambient Conditions( mounting orientation: axis horizontal)
maximum vertical load
150 N( 15 kg)
maximum dynamic force along the axis
1 N(/ HL: 5N)