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ANSz100 open loop z-scanner – three different scan ranges available
Scanners
10 mK.. 373 K 0.. 31 T 5E-11 mbar up to 50 µ m 2 100 g Size and Dimensions footprint; height weight Materials( non-magnetic) positioner body actuator driving shaft connecting wires Options environmental options material option Compatibility with Electronics open loop controller closed loop controller
24 x 24; 10 mm 19 g
titanium PZT ceramics ceramics insulated twisted pair, copper
/ RT, / HV, / UHV, / LT, / LT / HV, / LT / UHV / CuBe
ANC300: ANM200, ANM300 ANC350 / FPS
Fine Positioning Mode standard range fine positioning range large range
high stability
24 µ m @ 300 K 15 µ m @ 4 K
50 µ m @ 300 K 30 µ m @ 4 K
4.3 µ m @ 300 K 2 µ m @ 4 K
sub-nm resolution
fine positioning resolution |
Accuracy of Movement |
repeatability |
typically 0.1 % |
creep |
typically 0.5.. 0.8 % per decade of time |
linearity |
typically 5.. 10 % * |
Load @ Ambient Conditions( mounting orientation: axis horizontal) |
maximum vertical load |
1 N( 100 g) |
maximum torque on the axis |
20 Ncm |
* measured by maximum deviation from linear fit on full range
attoMOTION
Piezo-based Nano Drives