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ANSz100/std
ANSz100/lr
/RT,
ANSxyz100/hs
/HV,
/UHV,
/LT,
ANSxyz100/std
/LT/HV,
ANSx150
/LT/UHV
24 x 24; 10 mm 24 x 24; 10 mm 24 x 24; 10 mm 24 x 24; 10 mm 24 x 24; 9 mm
24 µm 50 µm 40 x 40 x 4.3 µm³ 50 x 50 x 24 µm³ 80 µm
15 µm 30 µm 9 x 9 x 2 µm³ 30 x 30 x 15 µm³ 125 µm
1 N 1 N 1 N 1 N 1 N
Working conditions and specifications
temperature
range
vacuum
range
magnetic
field range
travel
range
load
attoMOTION
Piezo-based Nano Drives