Size and Dimensions | |
footprint; height |
30 x 30; 12 mm |
max installation space |
36 x 30; 12 mm |
weight |
42 g |
Materials( non-magnetic) | |
positioner body |
titanium |
actuator |
PZT ceramics |
bearings |
ceramics |
driving shaft |
ceramics |
connecting wires |
insulated twisted pair, copper |
Options | |
environmental options |
/ RT, / HV, / UHV, / LT, / LT / HV, / LT / UHV |
material option |
--- |
encoder options |
/ RES |
high load option |
--- |
Compatibility with Electronics | |
open loop controller |
ANC300: ANM150, ANM300 |
Coarse Positioning Mode | |
travel range( step mode) |
6 mm |
typical minimum step size |
100 nm @ 300 K, 20nm @ 4 K |
max. drive velocity(@ 300 K, no load) |
approx. 3 mm / s |
Fine Positioning Mode | |
fine positioning range |
0.. 5 ยต m @ 300K, 0.. 0.8 @ 4 K |
fine positioning resolution |
sub-nm |
Accuracy of Movement( open loop) | |
repeatability of step sizes |
typically 5 % over full range |
forward / backward step asymmetry |
typically 5-10 % |
Load @ Ambient Conditions( mounting orientation: axis horizontal) | |
maximum vertical load |
20 N( 2 kg) |
maximum dynamic force along the axis |
2 N |