attoPUBLICATIONS attoCATALOG-2017/18 | Page 288

Linear Positioners
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ANPz102 | open loop linear , vertical stepper positioner

10 mK .. 373 K 0 .. 31 T 5E-11 mbar 5 mm 200 g
Optimized for optical focussing applications due to a minimized lateral runout .
Size and Dimensions footprint ; height max installation space weight Materials ( non-magnetic ) positioner body actuator driving shaft connecting wires Options environmental options material option encoder options Compatibility with Electronics open loop controller
24 x 24 ; 27 mm 24 x 24 ; 32 mm 53 g
titanium PZT ceramics ceramics insulated twisted pair , copper
/ RT , / HV , / UHV , / LT , / LT / HV , / LT / UHV / CuBe / RES , / ULT
ANC300 : ANM150 , ANM300
Coarse Positioning Mode
travel range ( step mode )
5 mm
typical minimum step size
50 nm @ 300 K , 10nm @ 4 K
max . drive velocity (@ 300 K , no load )
approx . 3 mm / s
Fine Positioning Mode
fine positioning range
0 .. 3.5 ยต m @ 300 K , 0 .. 0.5 @ 4 K
fine positioning resolution
sub-nm
Accuracy of Movement ( open loop )
repeatability of step sizes
typically 5 % over full range
forward / backward step asymmetry
typically 5-10 %
Load @ Ambient Conditions ( mounting orientation : axis vertical )
maximum vertical load
2 N ( 200 g )
maximum dynamic force along the axis
5 N