attoPUBLICATIONS attoCATALOG-2017/18 | Page 288

Linear Positioners
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ANPz102 | open loop linear, vertical stepper positioner

10 mK.. 373 K 0.. 31 T 5E-11 mbar 5 mm 200 g
Optimized for optical focussing applications due to a minimized lateral runout.
Size and Dimensions footprint; height max installation space weight Materials( non-magnetic) positioner body actuator driving shaft connecting wires Options environmental options material option encoder options Compatibility with Electronics open loop controller
24 x 24; 27 mm 24 x 24; 32 mm 53 g
titanium PZT ceramics ceramics insulated twisted pair, copper
/ RT, / HV, / UHV, / LT, / LT / HV, / LT / UHV / CuBe / RES, / ULT
ANC300: ANM150, ANM300
Coarse Positioning Mode
travel range( step mode)
5 mm
typical minimum step size
50 nm @ 300 K, 10nm @ 4 K
max. drive velocity(@ 300 K, no load)
approx. 3 mm / s
Fine Positioning Mode
fine positioning range
0.. 3.5 ยต m @ 300 K, 0.. 0.5 @ 4 K
fine positioning resolution
sub-nm
Accuracy of Movement( open loop)
repeatability of step sizes
typically 5 % over full range
forward / backward step asymmetry
typically 5-10 %
Load @ Ambient Conditions( mounting orientation: axis vertical)
maximum vertical load
2 N( 200 g)
maximum dynamic force along the axis
5 N