Coarse Positioning Mode | |
travel range ( step mode ) |
5 mm |
typical minimum step size |
50 nm @ 300 K , 10nm @ 4 K |
max . drive velocity (@ 300 K , no load ) |
approx . 3 mm / s |
Fine Positioning Mode | |
fine positioning range |
0 .. 3.5 ยต m @ 300 K , 0 .. 0.5 @ 4 K |
fine positioning resolution |
sub-nm |
Accuracy of Movement ( open loop ) | |
repeatability of step sizes |
typically 5 % over full range |
forward / backward step asymmetry |
typically 5-10 % |
Load @ Ambient Conditions ( mounting orientation : axis vertical ) | |
maximum vertical load |
2 N ( 200 g ) |
maximum dynamic force along the axis |
5 N |