attoPUBLICATIONS attoCATALOG-2017/18 | Page 283

ANPz51eXT | closed loop linear, vertical, and compact stepper positioner with extended travel range and position encoder

PAGE 281
Linear Positioners
ANPz51eXT | RES- positioner with resistive encoder
200 nm 10 mK.. 373 K 0.. 31 T
Size and Dimensions footprint; height max installation space weight Accuracy of Positioning encoder type sensor resolution repeatability Compatibility with Electronics closed loop controller
15 x 18; 17 mm 15 x 18; 23 mm 15 g
resistive sensor approx. 200 nm approx. 1.. 2 ยต m
ANC350 / RES
for all other specifications see open loop model ANPz51eXT
attoMOTION
Piezo-based Nano Drives